HAXPES

The utilisation of higher excitation energies facilitating an increase in the electron information depth

HarwellXPS is pleased to faciliate access to the world’s first high-throughput lab-based HAXPES spectrometer (Scienta Omicron) at the Sir Henry Royce Institute for Advanced Materials at the University of Manchester.

Using a high energy X-ray source (gallium metal jet, Ga Kα hν = 9250 eV, Excillum) bespoke monochromator and high KE electron energy analyser (EW4000), HAXPES is finally available outside of a synchrotron.

Sampling depths are extended from 3-10 nm for XPS up to 30-60 nm for HAXPES (element and core level dependent). The EW4000 analyser operates in an angle-resolved mode, meaning that angle-resolved XPS, reducing the sampling depth towards the surface, is captured in one measurement, enabling non-destructive depth profiling from the surface into the bulk.  Inelastic background modelling (Tougaard analysis using QUASES software, www.quases.com) enables detection of deeply buried layers up to 100s nm below the surface, extending sampling depths up to potentially twenty times the inelastic mean free path of electrons.

The HAXPES instrument includes heating/cooling facilities, there is a linked preparation chamber, and standard XPS using Al Kα is also available on the instrument. A vacuum suitcase can also be used to transport samples under vacuum for prevention of oxidation

Benefits

Applications

  • bulk-sensitive photoemission spectroscopy
  • non-destructive depth-profile of device stacks
  • angle-resolved measurements at same time
  • non-destructive depth-profiling of thin layer interfaceos
  • oxide or overlayer thickness measurements
  • layer-ordering of layers on a flat substrate.

Availability

This dedicated HAXPES facility is located at the University of Manchester. Applications can be made via HarwellXPS